FLUIDIZED BED ACTIVATED BY EXCIMER PLASMA AND MATERIALS PRODUCED THEREFROM

摘要

A housing for holding a fluidized bed activated by excimer plasma, includes a fluidization chamber for holding particles and gas. The fluidization chamber includes a central interior electrode contained within, having a conductive layer and a dielectric layer. The fluidization chamber further consists of at least one containment wall made from a dielectric material. The containment wall has an inside and an outside surface. An outer electrode is wrapped around the outside of the containment wall. A feed line is in fluid communication with the fluidization chamber for feeding plasma gas into the chamber, via a porous base. A radio frequency high voltage source is in electrical connection with both the inside/interior and outside electrodes.