发明名称 LASER MICROMACHINING AND METHODS AND SYSTEMS OF SAME
摘要 <p>The described embodiments relate to methods and systems for laser micromachining a substrate (206). One exemplary embodiment positions (802) a substrate (206) in an open air environment (403). The substrate (206) has a thickness defined by opposing first (210) and second (212) surfaces. The substrate (206) can be cut by directing (804) a laser beam (406) at the first surface (210) of the substrate (206) and introducing (806) an assist gas (414) proximate to a region (411) of the substrate (206) contacted by the laser beam (406).</p>
申请公布号 WO2003070415(P1) 申请公布日期 2003.08.28
申请号 US2002027456 申请日期 2002.08.29
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