发明名称 |
Method of transforming polymer film into carbon film in electron-emitting device |
摘要 |
In manufacturing surface conduction electron-emitting devices, a polymer thin film is arranged to connect a pair of electrodes and then transformed into a low resistivity film (carbon film) by irradiating the polymer film with an energy beam. The energy beam irradiation is scanned over the polymer films plural times so that heat due to the energy beam irradiation does not affect other members which constitute the device and also the processing time for carbonization of polymer film is reduced.
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申请公布号 |
US2003162467(A1) |
申请公布日期 |
2003.08.28 |
申请号 |
US20030368559 |
申请日期 |
2003.02.20 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
SHIMAZU AKIRA;MIZUNO HIRONOBU |
分类号 |
H01J9/00;H01J9/02;H01J9/04;H01J9/12;H01J9/24;(IPC1-7):H01J9/04 |
主分类号 |
H01J9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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