| 发明名称 |
NON-MECHANICAL FABRICATION OF CARBON-CONTAINING WORK PIECES |
| 摘要 |
Complex features and fine details are created in a carbon containing work piece by photolithography. A mask layer is deposited by evaporation onto the work piece. A desired pattern is created on the mask layer. The pattern is etched into the work piece and the remaining portion of the mask layer is dissolved. |
| 申请公布号 |
WO03021354(A3) |
申请公布日期 |
2003.08.28 |
| 申请号 |
WO2002US22504 |
申请日期 |
2002.05.17 |
| 申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
GOLECKI, ILAN |
| 分类号 |
C04B41/53;C04B41/91;F28F3/04;F28F21/02;G03F7/00;H01M8/02 |
主分类号 |
C04B41/53 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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