LOADLOCK CHAMBER WITH ILLUMINATION APPARATUS OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: A loadlock chamber with an illumination apparatus of a semiconductor equipment is provided to reduce a defect ratio of a wafer and improve yield by installing a lamp inside a loadlock chamber so that an operator can easily check the state of the inside of the loadlock chamber. CONSTITUTION: The lamp(21) is installed in a side of the inside of the loadlock chamber(5) to illuminate the inside of the loadlock chamber. A switch(23) is installed in the outside of the loadlock chamber to perform an on/off operation of the lamp.