| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem accompanied when an apparatus used to measure a characteristic of a layer by a quartz oscillator and other optical methods is provided. SOLUTION: The apparatus measures the characteristic of a thin layer coated on a substrate. The apparatus comprises two replaceable magazines, one magazine from among them is a magazine for a quartz resonator, and the other magazine is a magazine for a test glass. The replaceable magazine for the quartz resonator has a disk shape, and it is surrounded with an annular magazine for the test glass. Both magazines are turned independently of each other. Respective positions of the magazine are reproduced be being assisted with a sensor and an evaluation device. Consequently, a multilayer coating operation can be performed. COPYRIGHT: (C)2003,JPO
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