| 摘要 |
PROBLEM TO BE SOLVED: To utilize an existing lighting equipment as a lighting equipment for a clean booth in installing the clean booth in an existing building. SOLUTION: The clean booth 10 is installed in a clean room 11, which is the existing building. Closing plates 28 to be secured to the grid windows of a ceiling grid 16, which forms the ceiling section of the clean booth are formed of transparent material so that the light from the lighting equipment 52, which is installed in the ceiling section of the clean room 11 can be transmitted in the clean booth 10. COPYRIGHT: (C)2003,JPO
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