Deposition of tungsten films from W(CO)6,申请号EP20010306569-传众专利搜索

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发明名称	Deposition of tungsten films from W(CO)6
摘要
申请公布号	EP1179838(A3)	申请公布日期	2003.08.27
申请号	EP20010306569	申请日期	2001.07.31
申请人	APPLIED MATERIALS, INC.	发明人	YOON, HYUNGSUK ALEXANDER;YANG, MICHAEL X.;XI, MING
分类号	C23C16/16;H01L21/20;H01L21/28;H01L21/285;H01L21/3205;H01L21/768;(IPC1-7):H01L21/320	主分类号	C23C16/16
代理机构		代理人
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地址

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