| 摘要 |
PROBLEM TO BE SOLVED: To provide a method in which the optical parameter and a layer thickness of a multilayer system are decided surely than before not to react with an interference factor that affects a reflection spectrum. SOLUTION: An optimization reference is decided by the total amount of wavelength differences of all pairs of wavelength (λ<SB>1</SB>,<SB>i</SB>,λ<SB>2</SB>,<SB>j</SB>j=1,...M). COPYRIGHT: (C)2003,JPO
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