| 摘要 |
PROBLEM TO BE SOLVED: To quickly dry a washed body washed by non-volatile liquid or volatile liquid at a low cost, while avoiding surface oxidation of the washed body. SOLUTION: Residual washing liquid of the washed body is removed up to the extent without allowing air oxidation of the surface of the washed body by the existence of the residual washing liquid. Just after the removing, the washed body is placed in a superdry environment to completely remove the residual washing liquid of the washed body. COPYRIGHT: (C)2003,JPO
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