发明名称 |
Buried patterned conductor planes for semiconductor-on-insulator integrated circuit |
摘要 |
A semiconductor-on-insulator integrated circuit with buried patterned layers as electrical conductors for discrete device functions, thermal conductors, and/or decoupling capacitors. <IMAGE> |
申请公布号 |
EP0948054(A3) |
申请公布日期 |
2003.08.27 |
申请号 |
EP19990302313 |
申请日期 |
1999.03.25 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHRISTENSEN, TODD ALAN;SHEETS II, JOHN EDWARD |
分类号 |
H01L21/84;H01L23/52;H01L27/08;H01L27/12;H01L29/40;H01L29/786 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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