发明名称 Buried patterned conductor planes for semiconductor-on-insulator integrated circuit
摘要 A semiconductor-on-insulator integrated circuit with buried patterned layers as electrical conductors for discrete device functions, thermal conductors, and/or decoupling capacitors. <IMAGE>
申请公布号 EP0948054(A3) 申请公布日期 2003.08.27
申请号 EP19990302313 申请日期 1999.03.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHRISTENSEN, TODD ALAN;SHEETS II, JOHN EDWARD
分类号 H01L21/84;H01L23/52;H01L27/08;H01L27/12;H01L29/40;H01L29/786 主分类号 H01L21/84
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