发明名称 MULTILAYER WIRING APPARATUS, WIRING METHOD AND WIRING CHARACTERISTICS ANALYZING/ESTIMATING METHOD
摘要 A multi-layer wiring device includes a plurality of wiring layers which each have a plurality of wirings pitch-arranged in the same direction and are laminated on one another to make pitch-arrangement directions of the wirings of adjacent ones of the wiring layers cross each other. The device further includes a plurality of contact portions which connect the plurality of wirings to each other are provided to permit first and second potentials which are different from each other to be supplied to adjacent ones of the wirings of the plurality of wiring layers.
申请公布号 KR20030069890(A) 申请公布日期 2003.08.27
申请号 KR20030010989 申请日期 2003.02.21
申请人 发明人
分类号 H01L21/3205;H01L21/82;H01L21/822;H01L23/52;H01L23/522;H01L23/528;H01L27/04 主分类号 H01L21/3205
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