| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressure sensor capable of keeping tension in the radius direction and giving correct pressure indication during use. <P>SOLUTION: This pressure sensor has a first almost recessed metal body member and a second almost recessed body member; and a flexible metal diaphragm arranged between the metal body members and in which tension is applied in the radius direction by heating the sensor. The first and second body members are made of a material having a coefficient of thermal expansion of a range between about 0.0000056 inch/inch/°F and about 0.0000064 inch/inch/°F. The diaphragm is made of a precipitation hardening metal material having a coefficient of thermal expansion of about 0.0000060 inch/inch/°F. The first and second body members are made of a ferromagnetic metal material and shade the diaphragm from a magnetic field. <P>COPYRIGHT: (C)2003,JPO</p> |
