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发明名称
Conveying apparatus
摘要
申请公布号
EP0908931(A3)
申请公布日期
2003.08.27
申请号
EP19980203286
申请日期
1998.09.30
申请人
INNOTECH CORPORATION
发明人
YOSHIDA, MINORU;DOI, TAKESHI
分类号
B65G49/07;H01L21/00;H01L21/02;H01L21/677;(IPC1-7):H01L21/00
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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