| 摘要 |
PROBLEM TO BE SOLVED: To provide a resin precursor which has good processability owing to its solubility in an organic solvent, develops improved heat resistance after being formed into a cyclized product being the form of use, and gives a resin excellent in electrical properties, physical properties, and mechanical properties and suitable for uses such as an interlayer insulation film in a semiconductor. SOLUTION: An (organic solution) of a polybenzoxazole resin precursor having repeating units represented by formula (A) [wherein m and n are integers giving the sum of 2-1,000 and satisfying the relationships: 0.05≤(m/(m+n))≤1] is converted into an oxazole through a dehydrative condensation reaction and a crosslinking reaction, and the obtained polybenzoxazole resin is used as an insulation film material to form an insulation material. COPYRIGHT: (C)2003,JPO |
