METHOD AND APPARATUS FOR ASSEMBLING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a substrate assembly method and an apparatus therefor for sticking substrates together under a vacuum with high precision even when the substrates become larger and thinner. SOLUTION: In the method for assembling substrates, one substrate 1a to be stuck is held opposite to the other substrate 1b to be stuck, and both substrates are stuck under a vacuum with an adhesive member 52 provided to one of the substrates. The substrate 1a is held by a chamber unit 6 as a sticking means incorporated in a pressure plate 7 and stuck on the other substrate 1b. Then the sticking means is moved back into the pressure plate 7. COPYRIGHT: (C)2003,JPO