| 摘要 |
The lens holding bores are aligned towards the coating source, the central perpendicular to each bore axis intersecting the rotational axis of the substrate holder at a position centrally between two points representing the intersection points of the central perpendiculars of two imaginary bores on the same circle, the axes of the imaginary bores intersecting at the coating source. Preferred Features: One imaginary bore is at the longest distance from the coating source, the other the shortest distance. Bores are concentric two stage bores, the larger diameter part facing away from the coating source and holding the lens. All bores on a circle form the same angle with the rotation axis. The angles of all bores to the rotation axis can be varied through an additional correction angle according to the plasma power, the correction angle decreasing with greater plasma power and vice versa. |
