| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dividing method of work capable of dividing a large-sized work into small pieces of work in a short time. <P>SOLUTION: In the method surface crack lines 11, 12 having directions of X and Y are formed on one surface of a large-sized work 10, the other surface on which the surface crack lines 11, 12 is not formed is heated on a heating plate 20, a cooling plate 30 that has a liquid layer 40 on the bottom surface of it, i.e., on a touching surface of it, is touched to the surface of the large-sized work 10 on which the surface crack lines 11, 12 are formed, thus a temperature difference is caused between both surfaces of the large-sized work 10. The large-sized work 10 is divided into small pieces of work by the tensile stress working to widen the surface crack lines 11, 12 of the large-sized work 10 only in the direction to cross at right angles by preventing that the side of the heating plate 20 of the large-sized work 10 (the other surface) is apt to convexly bend and that the side of the cooling plate 30 of the large-sized work 10 (the one surface) is apt to concavely bend due to the temperature difference by maintaining the large-sized work 10 in a state restricting the bending of it in the thickness direction. <P>COPYRIGHT: (C)2003,JPO</p> |
