| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of safely dissolving titanium oxides without using substances which have danger of causing explosion such as hydrogen peroxide and hydroxyl amines. SOLUTION: Titanium oxides present in a surface film of titanium metal, in impurities formed in a semiconductor production process and an LCD module production process and in impurities included in silica, alumina and ceria are brought into contact with a quaternary ammonium salt such as a tetraalkylammonium salt, a trialkylbenzylammonium salt and a hydroxyalkyl- trialkylammonium salt, ozone and water at 20 to 100°C, so that the titanium oxides are dissolved. COPYRIGHT: (C)2003,JPO
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