发明名称 |
Crack stop between neighbouring fuses for protection from fuse blow damage |
摘要 |
A fuse structure in an integrated circuit chip is described that includes an insulated semiconductor substrate; a fuse bank integral to the insulated semiconductor substrate consisting of a plurality of parallel co-planar fuse links; and voids interspersed between each pair of the fuse links, the voids extending beyond a plane defined by the co-planar fuse links. The voids surrounding the spot to be hit by a laser beam during fuse blow operation act as a crack stop to prevent damage to adjacent circuit elements or other fuse links present. By suitably shaping and positioning the voids, a tighter pitch between fuses may be obtained. <IMAGE> |
申请公布号 |
EP1018765(A3) |
申请公布日期 |
2003.08.27 |
申请号 |
EP19990126273 |
申请日期 |
1999.12.31 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION;INFINEON TECHNOLOGIES AG |
发明人 |
NARAYAN, CHANDRASEKHAR;KIEWRA, EDWARD;RADENS, CARL;BRINTZINGER, AXEL |
分类号 |
B23K26/00;B23K26/38;B23K101/38;H01H69/02;H01H85/00;H01L21/3205;H01L21/82;H01L21/8242;H01L23/52;H01L23/525;H01L27/04;H01L27/108 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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