| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of canceling the output due to acceleration with a single vibrator without using a rubber vibration isolator. <P>SOLUTION: Teeth parts 81 and 82 on one side and teeth parts 83 and 84 on the other side of a vibrator 30 having an annular plane shape vibrate with opposite phases in drive vibration by stretching-vibrating in x-axis and y-axis directions from the center of figure B. When an angular velocity Ω is impressed around a z-axis, teeth parts 81 and 82 on one side and teeth parts 83 and 84 on the other side are vibrated in opposite phases along the x-axis by Corioli's force. At this moment, a first capacity variation between teeth parts 81 and 82 on one side and the first detection electrodes 71 and 72 and a second capacity variation between the other teeth parts 83 and 84 and the second detection electrodes 73 and 74 are differentially detected. <P>COPYRIGHT: (C)2003,JPO |
