摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas sensor element for preventing faults such as kage, cracks, and the like from being generated in a solid electrolyte board. <P>SOLUTION: A solid electrolyte board 11 made of partial stabilization zirconia, and a gas-permeable diffusion layer 141 for covering an electrode on the side of gas to be measured, are laminated. A shelter layer 142 that gas- impermeable is laminated on the diffusion layer 141. Additionally, a reference gas chamber-forming board 15 for composing a reference gas chamber that faces a reference electrode 21 is laminated on the solid electrolyte board 11. Then, at least one of the shelter layer 142, the diffusion layer 141, and the reference gas chamber-forming board 15 is made of a material where difference in the rate of shrinkage with the solid electrolyte board 11 is equal to or less than 0.3%, when cooling from 1470°C to 457°C in cooling after burning when manufacturing the gas sensor element. <P>COPYRIGHT: (C)2003,JPO |