| 摘要 |
PROBLEM TO BE SOLVED: To achieve a high image linearity even at a high deflection frequency. SOLUTION: The laser scanning microscope has deflectors (4 and 5) which are disposed to variably deflect a laser beam (1a) around a deflection angle and a control unit (26) which at least temporarily measures the present deflection angles by controlling the deflectors (4 and 5) by means of control signals. A test structure (17) comprising at least one components (25) (their positions (4 and 5) are allocated to the prescribed deflection angle values) is arranged on the downstream side from the deflectors during the measurement of the present deflection angle values and is provided with defectors (13, 14 and 30) which emit detection signals when the laser beam (1a) enters the components (25). The controller (26) is considered to allocate the present control signals to the prescribed deflection angle values when the controller receives the detection signals. COPYRIGHT: (C)2003,JPO
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