| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-frequency glow discharge emission spectrometric apparatus capable of performing measurement after a glow discharge is started. SOLUTION: A high-frequency power is oscillated by a high-frequency power source 5, the power is amplified, impedance is made to match with a ramp 1 by a matching part 6, and applied between the sample side electrode 1d and an anode 3b of the ramp 1. In the ramp 1, a pressure is reduced by a vacuum pump 3, argon gas is fed, the glow discharge is generated, the generated ions collide with a sample 4, the sample 4 is sputtered, excited to emit light in the plasma and the light is spectrally separated by a spectroscope 9. Meanwhile, a detector 7 detects a bias potential generated at a sample side electrode 1d at the discharge time, the presence or absence of the glow discharge is judged by the potential. The measurement of a data processing part 10 is started via a controller 8, and its result is displayed on a display part 11. COPYRIGHT: (C)2003,JPO
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