| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical probe scanning three-dimensional shape measuring method in which a step (a phase jump) causing a measurement error is corrected by a phase connection processing operation, even when a break is generated in phase information on interference fringes during an optical probe scanning operation so as to generate the step. SOLUTION: The optical probe scanning three-dimensional shape measuring method is provided with a process in which an optical probe is scanned with reference to an object to be measured, so as to calculate a first face shape on the basis of a measured result by measuring a face shape; a process in which a first fragment shape is calculated on the basis of a measured result by measuring a cross-sectional shape of the object to be measured; a process in which a second fragment shape corresponding to a measuring place in the first fragment shape is calculated by an interpolation processing operation on the basis of the first fragment shape; a process in which a first phase jump place generated in the second fragment shape is specified, on the basis of a difference between the first fragment shape and the second fragment shape; a process in which the first face shape is divided into a plurality of fragment shapes, so as to calculate a third fragment shape group; a process in which a fourth fragment shape corresponding to the first phase jump place is selected from the third fragment shape group; a process in which a second phase jump place contained in the fourth fragment shape is specified so as to calculate a correction amount; and a process in which a second phase jump place is calculated by using the second phase jump place and the calculated correction amount. COPYRIGHT: (C)2003,JPO
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