发明名称 |
Infrared detecting device |
摘要 |
A large-area high-output infrared detecting device S is realized in which a heat-separation-structure diaphragm 2 made of a thermal insulating material is formed through a cavity 7 from a silicon substrate 1, a thermocouple 4 serving as an infrared detection section is formed on the diaphragm 2, a heat absorption area 5 is formed on the thermocouple 4 through insulation layers 3a and 3b so as to have an etching aperture 9 for forming a cavity in the heat absorption area 5, and the cavity 7 is formed in a short time without being influenced by the size of the heat absorption area 5 to secure a structural strength. <IMAGE> |
申请公布号 |
EP1209455(A3) |
申请公布日期 |
2003.08.27 |
申请号 |
EP20010127321 |
申请日期 |
2001.11.19 |
申请人 |
IHI AEROSPACE CO., LTD. |
发明人 |
MORITA, SHINICHI;SHIBATA, NAMI |
分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/12;G01J5/14;H01L27/14 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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