Mold cleaning apparatus (1) includes a manifold (5) adapted to be coupled to a suction device. A first conduit (6) extends from the manifold (5) and has a first opening (8) remote from the manifold. A second conduit (7) extends from the manifold (5) and has a second opening (11) remote from the manifold (5). The first and the second openings (8, 11) being directed in opposite directions, and the first conduit (6) having a section (10) with a cross-sectional area which is less than cross-sectional area at any point along the length of the second conduit (7). <IMAGE>
申请公布号
EP1275484(A3)
申请公布日期
2003.08.27
申请号
EP20020078295
申请日期
2002.07.05
申请人
ASM TECHNOLOGY SINGAPORE PTE LTD.
发明人
HO, SHU CHUEN;KUAH, TENG HOCK;LIU, JIE;HUANG, ZHEN RONG;ONG, CHIN GUAN