发明名称 ABRASIVE GRAIN
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an abrasive grain capable of decreasing the attachment of the abrasive grains on the surface of an abrasive work, thus making the abrasion efficient, and capable of separation, recovery, and recycling of the abrasive grains after use, thus enabling the abrasion process at a low cost. <P>SOLUTION: This abrasive grain is a magnetic material of which the surface is coated with a continuous layer of an abrasive. In this method of abrasion using the abrasive grain, a cleaning method of the abrasion work surface, removal of the abrasive grain attached on an abrasive work using a magnetic action, is provided, and a recovery method of the abrasive grain from the slurry liquid after the abrasion using a magnetic action, is also provided. <P>COPYRIGHT: (C)2003,JPO</p>
申请公布号 JP2003238939(A) 申请公布日期 2003.08.27
申请号 JP20020038464 申请日期 2002.02.15
申请人 UNITIKA LTD 发明人 TANABE KATSUYUKI
分类号 B24B57/02;B24B37/00;C09K3/14;H01L21/304;(IPC1-7):C09K3/14 主分类号 B24B57/02
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