| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical substrate visual inspection apparatus by which a flat part and a grade part on a three-dimensional molded MID substrate are visually inspected simultaneously. SOLUTION: The optical substrate visual inspection apparatus is provided with a first light irradiation means 2 by which a substrate 10 is irradiated with parallel light from a direction at right angles to the substrate; a second light irradiation means 3 by which the substrate 10 is irradiated with light from an oblique direction; at least a pair of third light irradiation means 4 in which optical filters used to transmit light in a wavelength band at a low spectral reflectance in the surface of the substrate 10 are interposed, and which are arranged and installed nearly symmetrically with reference to a virtual line parallel to a conveyance direction of the substrate 10 so as to cross an optical axis of the means 2 in order to irradiate the parallel light from the oblique direction at the substrate 10; and a CCD camera imaging means 5 which detects reflected light and scattered light reflected to the direction at right angles to the substrate 10 when beams of light from the first, second and third light irradiation means 2, 3, and 4 are irradiated. COPYRIGHT: (C)2003,JPO
|
