| 摘要 |
PURPOSE: A magnet plate and an alignment structure of a magnet plate and a mask are provided to prevent a deformation of a mask pattern by allowing for a uniformity of distribution of magnetic field. CONSTITUTION: A magnet plate(10) comprises a plurality of mini-magnets(12) arranged at a predetermined pitch, wherein each of the mini-magnets has a shape of rectangular parallelepiped; and an insulator(14) interposed between the mini-magnets. A mask(20) fixed by the magnet plate has a plurality of patterns(22) arranged at a predetermined spacing. The mini-magnets of the magnet plate are arranged in a lengthwise direction perpendicular to the lengthwise direction of the patterns of the mask.
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