| 发明名称 |
METHOD OF DRILLING CERAMIC GREEN SHEET |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of drilling a ceramic green sheet capable of reducing the electric resistance of a metal paste within a via hole for connecting upper and lower electric circuit wiring to each other. <P>SOLUTION: The sectional shape of a laser beam is faired by a mask having a through-hole of a square shape. The laser beam faired by the mask is made incident on the ceramic green sheet by an imaging optical system for imaging the through-hole of the mask onto the front surface of the ceramic green sheet, by which a hole is formed in the incident position. <P>COPYRIGHT: (C)2003,JPO</p> |
| 申请公布号 |
JP2003236689(A) |
申请公布日期 |
2003.08.26 |
| 申请号 |
JP20020036924 |
申请日期 |
2002.02.14 |
| 申请人 |
SUMITOMO HEAVY IND LTD |
发明人 |
SORADA KAZUHIKO;YAMAGUCHI TOMOYUKI |
| 分类号 |
B23K26/00;B23K26/38;B23K101/36;B28B11/12;H05K3/00;(IPC1-7):B23K26/00 |
主分类号 |
B23K26/00 |
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