| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method and apparatus for recovering a solvent by which a high purity solvent is efficiently recovered from the solvent containing a evaporative alkaline material. <P>SOLUTION: A low boiling point impurity, the evaporative alkaline material, a high boiling point impurity and/or a non-volatile impurity are removed and the high purity solvent is recovered by evaporating the solvent containing impurities in an evaporation part A, separating the high boiling point impurity and/or the non-volatile impurity as still residue, supplying vapor containing the low boiling point impurity, the evaporative alkaline material and the solvent to a cleaning part B and cleaning using a cleaning liquid prepared by incorporating an acidic material to a material constituting the solvent to be recovered under a temperature and pressure in which the solvent in the vapor is substantially condensed to remove the alkaline material in the vapor and supplying the vapor in which the alkaline material is removed to a rectifying part C to be rectified. <P>COPYRIGHT: (C)2003,JPO</p> |
