| 摘要 |
PROBLEM TO BE SOLVED: To provide a polisher for polishing a machined surface without generating surface burn of the machined surface by supplying sufficient cooling air to a contact part between a polishing surface of a polishing tool and a workpiece to cool it. SOLUTION: The polisher comprises a chuck table for holding the workpiece and a polishing unit for polishing the workpiece held by the chuck table. The polishing unit comprises a rotating spindle, a tool mounting member mounted to the rotating spindle, and a polishing tool mounted to the tool mounting member. The rotating spindle and the tool mounting member have an air supply passage that communicates with a cooling air supplying means and supplies the cooling air to the polishing surface of the polishing tool. COPYRIGHT: (C)2003,JPO
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