| 摘要 |
PROBLEM TO BE SOLVED: To perform a cooling work giving a stabilized quality by carrying out the optimum cooling according to the characteristics of each of multiple kinds of cooling objects. SOLUTION: The vacuum cooling method comprises the cooling of a cooling object 2 by evacuating a treating chamber 3. The pressure regulating pattern for evacuating the chamber 3 is predetermined and the chamber 3 is evacuated according to the pressure regulation pattern. COPYRIGHT: (C)2003,JPO
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