SILICON OXIDE COATING FILM WITH EXCELLENT GAS BARRIER PROPERTY AND PACKAGING BODY USING IT

摘要

PROBLEM TO BE SOLVED: To provide a silicon oxide coating film which exhibits especially excellent gas barrier properties and can achieve the excellent gas barrier properties by a thinner film thickness than the thickness of conventional ones and has a formed coating film being excellent in pliability and flexibility and has excellent productivity. SOLUTION: In the silicon oxide coating film formed on a plastic base material, the silicon oxide coating film is characterized by being formed by chemical vapor deposition of an organic silicone compound and an IR characteristic absorption of SiCH3at a wavenumber of 845-833 cm-1 being substantially zero and an IR absorbance ratio (A) of SiOH/SiO being at most 0.25. COPYRIGHT: (C)2003,JPO