SPOTTING NOZZLE

摘要

PROBLEM TO BE SOLVED: To provide a spotting nozzle capable of freely selecting different liquids to form a spot of a picoliter order in a non-contact state. SOLUTION: This spotting nozzle is equipped with a leading end fine pipe part, which has an open hole for allowing a nozzle orifice formed to the tip part of the spotting nozzle to communicate with the outside from a lateral direction at a position separated from the leading end of the nozzle orifice by a predetermined distance and the nozzle orifice part on the leading end side of the nozzle orifice from the position of the open hole formed thereto, and a high air supply means for supplying high pressure air toward the leading end fine pipe part from the nozzle orifice part behind the position. A liquid to be transferred is held in the leading end fine pipe part when the leading end part of the nozzle is immersed in a holding tank and liquid drops are ejected to the surface of a substrate plate by the high pressure air of the high pressure air supply means to transfer the liquid to be transferred. COPYRIGHT: (C)2003,JPO