| 摘要 |
PROBLEM TO BE SOLVED: To widen a moving range of a rocking table by a large moving range of an actuator. SOLUTION: First, second and third direct-acting actuators connected to a fixed bed move the other end parts of fourth, fifth and sixth direct-acting actuators. The movement relates to the yaw motion mainly in the X-direction and y-direction to the rocking table connected to each one end of the fourth, fifth and sixth direct-acting actuators. By the fourth, fifth and sixth direct-acting actuators connecting the actuators on the fixed bed and the rocking table, the rolling and pitching and Z-direction movement are mainly performed to the rocking table. The motion related to the movement of the first, second and third direct-acting actuators and the motion related to the movement of the fourth, fifth and sixth direct-acting actuators are mainly different so as to prevent interference thereof. Accordingly, the moving range of the rocking table having a combination of moving directions not to cause interference can be enlarged. COPYRIGHT: (C)2003,JPO
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