TREATMENT METHOD FOR ZINC OXIDE PHOTOCATALYST THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for enhancing the photocatalytic activity of a zinc oxide photocatalyst thin film used for environmental purification and the like. SOLUTION: A highly-oriented zinc oxide thin film which is film-deposited on the surface of a base body and whose C-axis is perpendicular to a base plate is subjected to nitrogen radical treatment at 50 to 400°C temperature of the base body to enhance the photocatalytic activity of zinc oxide. For example, the highly-oriented zinc oxide thin film whose C-axis is perpendicular to the base plate is film-deposited on the surface of the base body by an MOCVD method and zinc oxide is irradiated with nitrogen radical using a radical source mounted on an MOCVD device. COPYRIGHT: (C)2003,JPO