| 摘要 |
PROBLEM TO BE SOLVED: To attain a stable ink drop ejection characteristic by eliminating variation of a fluid resistance of an ink supply passage in an inkjet head having a plurality of nozzles arranged in regularity. SOLUTION: Ink supply passages 5 and pressurizing chambers 6 are formed on a silicon fluid passage plate in continuous patterns. A diaphragm bonded to the silicon fluid passage plate is driven by a PZT 14 and a pressure is applied to ink in the pressurizing chamber 6 to eject ink drops from a nozzle 2. The ink supply passages 5 and the pressurizing chambers 6 are formed on the identical substrate by anisotropic etching in a depth of 90μm. The pattern widths W<SB>lc</SB>, W<SB>rf</SB>of the pressurizing chamber 6 and the ink supply passage 5 are set to be 140μm and 28μm, respectively. When the width W<SB>rf</SB>of the ink supply passage is to be at most one-third of the depth of the ink supply passage, it is possible to reduce variation in fluid resistances of the ink supply passages 5. COPYRIGHT: (C)2003,JPO
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