| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method capable of forming a coating film having excellent uniformity while effectively preventing generation of bubbles. <P>SOLUTION: The device for forming the coating film has a spin chuck 2 for holding a substrate 1 having an irregular pattern area in a horizontal state, a spin motor 3 for rotating the substrate 1 held thereon, a nozzle 4 arranged in a state opposing to the substrate 1 held on the spin chuck 2 and a nozzle moving means 5 for moving the nozzle 4 in the horizontal direction, and is equipped with a supply means for a coating film forming material for supplying the coating film forming material from the nozzle 4 to a nearly whole area of the pattern areas of the substrate 1 and a control means for controlling driving conditions of a rotary drive means and the supply means for the coating film forming material. The coating film forming material is supplied to the nearly whole area of the pattern area of the substrate 1 by the drive of the supply means for the coating film forming material in a state that the substrate 1 held on the spin chuck 2 is stopped to rotate using the device for forming the coating film, then the substrate 1 is rotated by the drive of the spin motor 3. <P>COPYRIGHT: (C)2003,JPO |
