| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist coating device with a resist mist removing part for removing resist mist in an exhaust gas current without using a mesh-like mist trap which is easily clogged, stable guiding the resist mist to an exhaust system and having no fear of exerting an undesirable influence on the coating thickness of a resist coated on a substrate of a semiconductor. <P>SOLUTION: An exhaust system 101 with a resist removing part has an exhaust tube 103a connected to a liquid storing vessel 102 arranged in the lower place of an exhaust hole 16, a side pipe 104, a small fan 105, a pressure gauge 20, a number of revolutions-control part 106 for controlling the number of revolutions of the small fan 105, a spray nozzle 108 for spraying water mist 107 in a spray form, the liquid storing vessel 102 in which water 109 is stored and an exhaust tube 103b connected to an exhaust pump 17 from an air hole 110 provided on the upper face of the liquid storing vessel 102. <P>COPYRIGHT: (C)2003,JPO |
