发明名称 |
Method of removing diamond coating and method of manufacturing diamond-coated body |
摘要 |
A method of removing a diamond coating from a substrate of a diamond-coated body which includes the substrate coated with the diamond coating. The method includes a step of heating the diamond-coated body at a predetermined temperature in a reactor at a predetermined reduced pressure, while introducing an oxygen gas into the reactor at a predetermined flow rate, for burning the diamond coating to thereby remove the diamond coating from the substrate.
|
申请公布号 |
US6610611(B2) |
申请公布日期 |
2003.08.26 |
申请号 |
US20010822425 |
申请日期 |
2001.04.02 |
申请人 |
OSG CORPORATION |
发明人 |
LIU HAO;HANYU HIROYUKI;TANAKA MASAHIRO |
分类号 |
B23B27/20;B08B7/00;B23P15/28;C23C16/02;C23C16/26;C23C16/27;C23G5/00;(IPC1-7):H01L21/31 |
主分类号 |
B23B27/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|