发明名称 |
Information storage on masks for microlithographic tools |
摘要 |
A mask includes an in-situ information storage mechanism on the mask, which stores mask pattern data that is supplied to a microlithographic tool (e.g., an optical stepper). The advantages of using the invention include immediate availability of pattern data of a particular mask to the microlithographic tool for improved integrated circuit productivity.
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申请公布号 |
US6610446(B2) |
申请公布日期 |
2003.08.26 |
申请号 |
US20010770732 |
申请日期 |
2001.01.26 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LERCEL MICHAEL JAMES |
分类号 |
G03F1/14;G03F7/20;(IPC1-7):G03F9/00;G03C5/00;G06F17/50;G21K5/00 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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