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发明名称
摘要
申请公布号
JP3439379(B2)
申请公布日期
2003.08.25
申请号
JP19990163386
申请日期
1999.06.10
申请人
发明人
分类号
H01L27/092;H01L21/265;H01L21/266;H01L21/8234;H01L21/8238;H01L27/088;H01L29/78;(IPC1-7):H01L21/823;H01L21/823
主分类号
H01L27/092
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