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发明名称
Siliciumbaseret sensorsystem
摘要
申请公布号
DK1214864(T3)
申请公布日期
2003.08.25
申请号
DK20000958265T
申请日期
2000.09.06
申请人
SONIONMEMS A/S
发明人
KUHMANN, JOCHEN, F.;SCHEEL, PETER, U.;MUELLENBORN, MATTHIAS
分类号
H04R19/00;H04R19/04;H04R25/00;(IPC1-7):H04R19/00
主分类号
H04R19/00
代理机构
代理人
主权项
地址
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