| 摘要 |
PURPOSE: A dry cleaning device of an LCD panel is provided to melt or remove particles, especially organic remaining on a surface of a glass, thereby preventing the surface of the glass from being recontaminated by static electricity. CONSTITUTION: A plurality of CO2 gas jet units(10) jet liquid CO2 gas as dry ice through a plurality of jet nozzles(13) when an LCD panel(1) transferred into a dry chamber passes under a dry cleaning device(100). An ionizing unit(20) reduces static electricity generated on a surface of a glass of the LCD panel by the jet CO2 gas. A vacuum unit(30) vacuum-absorbs particles, especially organic melted or rising from the surface of the glass by the CO2.
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