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发明名称
摘要
申请公布号	JP3439042(B2)	申请公布日期	2003.08.25
申请号	JP19960257100	申请日期	1996.09.27
申请人		发明人
分类号	H01L21/8249;H01L21/8222;H01L21/8248;H01L27/06;(IPC1-7):H01L21/824;H01L21/822	主分类号	H01L21/8249
代理机构		代理人
主权项
地址

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