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发明名称
摘要
申请公布号
JP3439645(B2)
申请公布日期
2003.08.25
申请号
JP19980038585
申请日期
1998.02.20
申请人
发明人
分类号
G01B11/30;G01J3/44;G01N21/27;G01N21/64;G01N21/65;G01N37/00;G01Q60/02;G01Q60/06;G01Q60/16;G01Q60/22;G01Q60/38;G01Q70/14;(IPC1-7):G01N13/14;G12B21/06
主分类号
G01B11/30
代理机构
代理人
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地址
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