| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact inclination sensor device capable of highly accurately detecting an inclination amount in a two-dimensional direction, and detecting/correcting a moving amount vertical to the mirror surface of a galvanometer mirror. SOLUTION: The positions of a second photodetector 8 and a third photodetector 9 are arranged so that the backside of a galvanometer mirror 6 is set in a nearly conjugated position with respect to a condenser lens 5, and a spot of aboutϕ0.1 to 0.2 mm is formed. By using the second photodetector 8 and the third photodetector 9, an offset amount vertical to a mirror surface is detected, and the galvanometer mirror 6 is corrected in a Z direction. Thus, an error in the inclination sensor is reduced, and an inclination amount is highly accurately detected in a wide range. COPYRIGHT: (C)2003,JPO
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