POLYCRYSTAL SEMICONDUCTOR FILM AND MANUFACTURING METHOD, AND MANUFACTURING DEVICE FOR SEMICONDUCTOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for evaluating the quality of a polycrystal semiconductor film and forming a uniform polycrystal semiconductor film and a manufacturing method and a manufacturing device for a semiconductor element having the polycrystal semiconductor film. SOLUTION: At least one transmission rate measuring means for measuring the transmission rate of the semiconductor film and at least one reflection factor measuring means for measuring the reflection factor of the semiconductor film are provided. The transmission rate and the reflection factor of the semiconductor film are measured during or immediately after a laser anneal process. According to the result of the measurement, the quality of the semiconductor film is inspected and the feedback of result of the inspection to a laser light source is effected to control the laser anneal process. COPYRIGHT: (C)2003,JPO